SiC単結晶膜中欠陥の高分解能非破壊観察法の開発
Development of high-resolution and non-destructive observation techniques on SiC epilayers

厚膜 SiC 単結晶成長ならびに SiC 表面吸着質・酸化膜評価に関する研究
Study on growth of thick SiC epitaxial layers and characterization of surface adsorbates and oxides on SiC

高電圧炭化ケイ素（SiC）pnダイオードのプロセス技術の開発 -通電劣化抑制手法の基礎検討と高電圧SiC pnダイオードの試作-
Development of process technologies for high voltage SiC pn diode fabrication-Investigation of reduced technique for forward voltage degradation and fabrication of high beakdown voltage SiC pn diode-

大容量SiCパワー半導体素子に向けたエピタキシャル結晶成長技術の開発 -低マイクロパイプ密度，厚膜・高純度4H-SiCエピタキシャル単結晶膜の形成-
Development of epitaxial growth techniques for high-power SiC semiconductor devices